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Product details
About this part
The SWAGELOK 6LVV-MSM-ALD3E-3-P-CS VALVE is made by Swagelok and identified by manufacturer part number 6LVV-MSM-ALD3E-3-P-CS.
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × SWAGELOK 6LVV-MSM-ALD3E-3-P-CS VALVE.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (Swagelok), the part number (6LVV-MSM-ALD3E-3-P-CS) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.
Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- Swagelok
- Part number
- 6LVV-MSM-ALD3E-3-P-CS
- Component Type
- Valve
- Country of Origin
- United States
- Manufacturer
- Swagelok
- Part number (engraved)
- 6LVV-MSM-ALD3E-3-P-CS
- Series
- ALD3, 1.125 in. modular surface mount, 3-port, C-seal
- Body material
- 316L VIM-VAR stainless steel (6LVV)
- Actuation
- Pneumatic, normally closed
- Actuation pressure
- 60 to 90 psig (4.2 to 6.2 bar); cap marked 60 psig (414 kPa) min.
- Pressure rating
- Vacuum to 145 psig (10.0 bar)
- Flow coefficient
- Cv 0.27
- Actuator temperature
- 32 to 248°F (0 to 120°C)
- Diaphragm / seat
- Cobalt-based superalloy (UNS R30003) / PFA
- Process
- Swagelok Ultrahigh-Purity Process Specification SC-01 (P)
- Position sensor
- 3-wire DC, current-sourcing, NO, 10-30 V DC, M8 3-pin plug
- Sensor cable label
- BES 516-3007-E4-C-S49-00,2
The Swagelok 6LVV-MSM-ALD3E-3-P-CS is an ALD3 series atomic layer deposition (ALD) diaphragm valve: a 1.125 in. 3-port modular surface-mount valve with a normally closed pneumatic actuator and a factory-fitted electronic actuator-position sensor. Swagelok ALD valves are ultrahigh-purity valves for atomic layer processing in semiconductor equipment. The part number is engraved on the valve base together with the number 0001062676.
What does the part number mean?
From the Swagelok ALD valve catalog (MS-02-301): 6LVV is 316L VIM-VAR stainless steel, MSM-ALD3E-3 is the ALD3 1.125 in. modular surface-mount valve with standard actuator and 3 ports (C-seal), P is the Swagelok Ultrahigh-Purity Process Specification (SC-01), C is a normally closed actuator and S is the electronic actuator-position sensor with a short pigtail connector.
What does the position sensor do?
It sends a signal when the pneumatically actuated valve is open. Swagelok lists it as a 3-wire DC sensor with a current-sourcing transistor output, normally open, 10 to 30 V DC, polarity protected, rated -10 to 158°F (-23 to 70°C). The sensor cable on this valve carries a label reading BES 516-3007-E4-C-S49-00,2 and ends in a 3-pin M8 male plug. Swagelok notes the sensors are third-party products.
What are the ALD3 ratings?
Per the catalog: pressure rating vacuum to 145 psig (10.0 bar), with less than 35 psig recommended for best cycle life; flow coefficient Cv 0.27; actuator temperature 32 to 248°F (0 to 120°C); actuator capable of opening or closing in less than 5 ms. Normally closed actuation pressure is 60 to 90 psig (4.2 to 6.2 bar), and the actuator cap is marked "60 psig (414 kPa) min. pressure".
What is in the photos?
The valve with its blue ALD actuator band, the top cap marked Swagelok ALD3E Normally Closed, the engraved base with three ports and four mounting holes, the sensor cable label and M8 plug, and a Balluff-labeled cable in a bag. Condition: used.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Accepted within 60 days of delivery
- Return shipping
- Free — paid by us
- Refund
- Money back
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
What is an ALD valve?
A high-speed, ultrahigh-purity diaphragm valve used to pulse precursor gases in atomic layer deposition (ALD) semiconductor tools. Swagelok's ALD3 actuator can open or close in less than 5 ms.
What does -CS mean on a Swagelok ALD3 valve?
C is a normally closed actuator and S adds the factory-fitted electronic actuator-position sensor with a short pigtail connector.
What air pressure opens it?
It is normally closed, so air opens it. Swagelok gives 60 to 90 psig (4.2 to 6.2 bar) for the normally closed ALD3, and the cap reads 60 psig (414 kPa) min. pressure.
What is the Cv of the Swagelok ALD3?
Cv 0.27, per the Swagelok ALD valve catalog.
How is the position sensor wired?
It is a 3-wire DC sensor (brown, blue, black per the catalog wiring diagram) with a current-sourcing output, 10 to 30 V DC, on a 3-pin M8 plug. It signals the open position.
What condition is it in?
Used, from equipment. The ALD actuator band, cap markings and base engraving are clear.
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