Swagelok
6 Swagelok parts in stock · updated every few minutes
Swagelok diaphragm valve listings from semiconductor equipment: ALD3 series ultrahigh-purity valves with VCR and modular surface-mount connections, and 6LV series diaphragm valves. Each listing shows the actual unit with its part number and condition.
In stock by condition
Swagelok by category
Swagelok part numbers in stock
Tap a part number to see what's in stock
Newest Swagelok parts
Most are single units
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Swagelok 6LVV-ALD3MR4-P-C
SWAGELOK ALD3, 6LVV-ALD3MR4-P-C DIAPHRAGM VALVE
$70.00
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Swagelok 6LVV-MSM-ALD3E-3-P-CS
SWAGELOK 6LVV-MSM-ALD3E-3-P-CS VALVE
$150.00
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Swagelok 1091-082-01
ASM GAS BOX 1091-082-01, 18393-STP
$1,700.00
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Swagelok 1091-082-01
ASM GAS BOX 1091-082-01, 18391-STP
$1,700.00
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Swagelok 6LV-HBC111PX-C
SWAGELOK 6LV-HBC111PX-C DIAPHRAGM VALVE
$110.00
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Swagelok 1091-082-01
ASM GAS BOX 1091-082-01
$1,700.00
Looking for a discontinued Swagelok part?
Send us the part number — we'll search our warehouse and sourcing network.
About Swagelok parts at YP Tech Solutions
The Swagelok parts here are ultrahigh-purity valves removed from semiconductor process equipment. Each listing is one real unit, photographed with the ordering number engraved or printed on the valve.
Swagelok valves we list
- ALD3 series valves — pneumatically actuated Swagelok diaphragm valve types for atomic layer deposition, with VCR or modular surface-mount connections.
- 6LV series diaphragm valves — compact high-purity diaphragm valves from gas delivery lines.
Reading a Swagelok ordering number
Swagelok ALD valves are built to order: the same series comes normally closed or normally open, with VCR or surface-mount connections and optional position sensing. Those choices are coded in the ordering number, so match the full number on your valve, not just the series.
Before you order
Compare the photos with the part you are replacing and read the condition notes — the condition guide explains each grade. We are not an authorised Swagelok dealer. If you cannot find a part number, send it to us and we will check our stock and sourcing network.
Questions about Swagelok parts
Which Swagelok valves do you sell?
Swagelok ultrahigh-purity diaphragm valves from semiconductor equipment, mainly ALD3 series and 6LV series, when we have them. Each listing shows the full ordering number and condition.
What is a Swagelok ALD valve used for?
Swagelok ALD3 and ALD6 valves are ultrahigh-purity diaphragm valves for the fast, repeated precursor dosing used in atomic layer deposition and other semiconductor processes.
How do I match a Swagelok valve part number?
Compare the full ordering number on your valve with the one in our photos, because the suffix codes the end connections, actuator type and options such as position sensing. If your number differs, send it through Request a Part and we will check before you order.
Are you an authorised Swagelok dealer?
No. We are an independent supplier of new, surplus and used parts. Swagelok is a trademark of its owner and is used here only to identify the parts.
Can you find a Swagelok part that is not listed?
Send us the part number through Request a Part. We will check our stock and sourcing network and reply with availability, condition and price.