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Product details
About this part
The AZBIL SPG6CT13HD100585 Sapphire Capacitance Diaphragm Gauge RANGE 133.32kPa is made by AZBIL and identified by manufacturer part number SPG6CT13HD100585.
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × AZBIL SPG6CT13HD100585 Sapphire Capacitance Diaphragm Gauge RANGE 133.32kPa.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (AZBIL), the part number (SPG6CT13HD100585) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
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Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- AZBIL
- Part number
- SPG6CT13HD100585
- Model
- SPG6CT13HD100585
- Country of Origin
- Japan
- Series
- SPG6, extra high-temperature model; C = anti-deposition model
- Measurement
- Absolute pressure, capacitive sapphire sensor
- Full-scale range
- 0–133.32 kPa (code T13)
- Self-heating temperature
- 200 °C (code H)
- Coupling
- 8 VCR (female) equivalent, SUS316L with electrolytic grinding (code D)
- Default event settings
- Event 1: 10.0 %FS; event 2: 58.5 %FS (codes 100 / 585)
- Accuracy
- 0.5 % of reading (self-heating 160 °C or more)
- Resolution
- 1/10,000 FS
- Response time
- 40 ms (SPG_C, range 100 Pa or more)
- Input power
- ±15 V DC ±10 % (dual) or 24 V DC ±10 % (single)
- Power consumption (200 °C)
- 16 W max. in operation, 23 W max. during warm-up; 1.1 A max. at 24 V DC
- Output signal
- 0–10 V DC, load 10 kΩ min.
- I/O connector
- D-sub 15-pin male, #4-40 UNC retaining screws
- Event relays
- 3, form 1c; 1 A at 30 V DC resistive max.
- Gas-contacting materials
- Sapphire, DSALOY (Inconel equivalent), SUS316L
- Warm-up time
- 30 min nominal, 1 h max.
- Operating ambient
- 10–65 °C mounted vertically, 10–70 °C horizontally (cooling air 0.5 m/s at 45 °C or more)
- Leak rate
- 1 × 10⁻¹⁰ Pa·m³/s or less
- Mass
- 520 g (8 VCR coupling)
- Marking
- CE
The Azbil SPG6CT13HD100585 is a sapphire capacitance diaphragm vacuum gauge from Azbil Corporation's SPG6 extra high-temperature series. Its model code decodes, from Azbil's model selection table, as the anti-deposition model (C) with a 0–133.32 kPa full-scale range (T13), a 200 °C self-heating temperature (H) and an 8 VCR female-equivalent coupling (D). The nameplate confirms the 133.32 kPa range, 200 °C self-heat temperature, ±15 V or +24 V DC input and 0–10 V DC output. Made in Japan.
What is the SPG6CT13HD100585 used for?
Azbil describes its SPG gauges as especially suited to semiconductor manufacturing. The single-crystal sapphire sensor resists corrosion and high temperature, and this SPG6 extra high-temperature unit holds its sensor at a self-heating temperature of 200 °C under digital PID control. The gauge measures absolute pressure and reports it as a 0–10 V DC signal.
How is the gauge connected?
Power, output and three event relays run through a 15-pin male D-sub connector with #4-40 UNC retaining screws. The gauge runs on ±15 V DC dual supplies or a single 24 V DC supply. The connector end also carries three event relay LEDs, a status LED, an auto-zero button, zero up/down buttons and a loader jack for Azbil's Smart Loader software. The last six digits of the model number set the default event relay points: 10.0 %FS for relay 1 and 58.5 %FS for relay 2.
What condition is this gauge in?
Used. The photos show the stainless-steel body with its vented upper cover, the nameplate, the hot-surface warning label, the D-sub connector end and the process fitting. Allow the warm-up time of 30 minutes nominal (1 hour maximum) before relying on readings after installation.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Accepted within 60 days of delivery
- Return shipping
- Paid by the buyer
- Refund
- Money back
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
What does the model number SPG6CT13HD100585 mean?
SPG6 is Azbil's extra high-temperature sapphire gauge, C the anti-deposition model, T13 a 0–133.32 kPa range, H 200 °C self-heating and D an 8 VCR female-equivalent coupling. 100 and 585 are the default event relay settings, 10.0 %FS and 58.5 %FS.
What power supply does the gauge need?
Either ±15 V DC dual supplies or a single 24 V DC supply, each ±10 %. At 200 °C it draws up to 23 W during warm-up, 1.1 A max. on 24 V DC.
What output signal does it give?
0–10 V DC, linear to pressure over the 0–133.32 kPa range, on the 15-pin D-sub connector. The minimum load is 10 kΩ.
How long does it take to warm up?
Azbil gives 30 minutes nominal and 1 hour maximum for the sensor to reach its 200 °C operating temperature. The status LED is orange during warm-up and green when ready.
Is 133.32 kPa the same as 1000 Torr?
Yes. 133.32 kPa equals 1000 Torr, so this is the 1000 Torr full-scale version.
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