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Product details
About this part
The Anelva A-NET M-320XG M320XG Crystal Gauge is made by Anelva and identified by manufacturer part number M-320XG.
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × Anelva A-NET M-320XG M320XG Crystal Gauge.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (Anelva), the part number (M-320XG) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.
Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- Anelva
- Part number
- M-320XG
- Model
- M-320XG
- Series
- A-NET
- Sensing principle
- Quartz crystal resonator, no filament
- Measurement range
- 10⁻² to 1 × 10⁵ Pa (manufacturer's current catalog)
- Pressure output
- 0–10 VDC; log, multiple or linear (switch selectable)
- Set points
- 2 contact outputs (photocoupler, 1 A 30 VDC)
- Remote I/O
- D-sub 15-pin; inputs for gas type, zero adjust, ATM setting
- Supply voltage
- 22–33 VDC, 2 W
- Operating temperature
- 5 to 50 °C
- Replaceable sensor
- XG1
- Flange
- KF type (size to be confirmed)
- Manufacturer
- Canon Anelva Corporation
The Canon Anelva M-320XG is an A-NET crystal gauge – a vacuum gauge whose sensor is a quartz crystal resonator, with no filament or other heat source. The gauge head and its electronics are one compact unit that mounts directly on the vacuum port. Canon Anelva lists a measurement range from 10⁻² Pa up to atmospheric pressure (1 × 10⁵ Pa), and the gauge can also be used as an atmospheric-pressure sensor. Also searched as M320XG or Anelva A-NET crystal gauge.
What outputs and controls does the M-320XG have?
The front panel carries the D-sub 15-pin REMOTE I/O connector, a POWER/ALM lamp, ATM and ZERO adjustment buttons, and rotary switches for the D/A output and for set points SP1 and SP2 (each set as exponent and mantissa). Canon Anelva specifies a 0–10 VDC pressure signal (log, multiple or linear output, selected by switch), two set-point contact outputs, and a 22–33 VDC supply.
Where is the M-320XG used?
Canon Anelva lists semiconductor and electronic-component manufacturing equipment, accelerator equipment, space chambers, electron-beam equipment and analyzers among its applications. Because the sensor has no filament, it does not heat the process gas.
What condition is this gauge in?
Used. The photos show the white housing with light marks, the stainless KF-type flange port with a screen visible inside, and the front controls intact.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Not accepted
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
What is the measuring range of the Anelva M-320XG?
Canon Anelva's catalog gives 10⁻² Pa to 1 × 10⁵ Pa (atmospheric pressure), with ±15 % accuracy from 1 Pa to 1 × 10⁵ Pa (except 1 × 10² to 5 × 10³ Pa).
What signal does the M-320XG output?
A 0–10 VDC pressure signal, switch-selectable as log, multiple or linear output, plus two set-point contact outputs, all on the D-sub 15-pin remote I/O connector.
What power does the M-320XG need?
22 to 33 VDC, with a power consumption of 2 W.
Does the crystal gauge have a filament?
No. It measures pressure with a quartz crystal resonator, so there is no filament or heat source in the sensor.
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