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About this part

The Aera FC-PIR98x MGMR Mass Flow Controller FCPIR981CBAX9THA, Lam Research 797-160431-073, 500 SCCM Si(CH3)4 is made by AERA and identified by manufacturer part number 797-160431-073.

This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.

Condition

This item is listed as Used. Previously used. See condition notes and photos.

The photos are part of the description — check them for labels, connectors, markings and any visible wear.

What's included

1 × Aera FC-PIR98x MGMR Mass Flow Controller FCPIR981CBAX9THA, Lam Research 797-160431-073, 500 SCCM Si(CH3)4.

Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.

Identification & compatibility

Check the manufacturer (AERA), the part number (797-160431-073) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.

Price match

Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.

Important information

Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.

Brand
AERA
Part number
797-160431-073
Brand / maker
Aera; label: Hitachi Metals, Ltd.
Series
FC-PIR98x pressure insensitive MFC, MGMR
Model
FCPIR981CBAX9THA
Lam Research P/N
797-160431-073
Configured gas
Si(CH3)4, SEMI gas 251, CF 0.174
Full scale (UFS)
500 SCCM
Calibration gas / range
N2, 3000 SCCM
Bin
MULTI-07
Firmware
3.21
Connector
9-pin D-sub, MODE button, STATUS LED
Serial number
C160602144
Manufactured
2016-06-14, made in China (label)

Lam Research 797-160431-073, an Aera FC-PIR98x pressure insensitive MFC set for Si(CH3)4 at 500 SCCM. Model FCPIR981CBAX9THA, the MGMR (multi-gas, multi-range) version. Serial C160602144, manufactured 2016-06-14 by Hitachi Metals, Ltd. per the side label. Also written 797160431073 or FCPIR981 CBAX9THA.

Is it set for N2 or Si(CH3)4?

Both numbers are on it. The Lam label at the connector end gives the process setup: UFS 500 SCCM, gas Si(CH3)4 (tetramethylsilane), SEMI GAS 251, CF 0.174, BIN MULTI-07. The CAL DATA label, headed LAM DEP, shows the calibration: range 3000 SCCM on N2, with N2 check points at 100, 50, 30 and 10%.

How does a pressure insensitive MFC differ from a standard one?

A pressure insensitive (PI) mass flow controller holds the set flow when the upstream supply pressure moves, so swings on the gas line do not turn into flow errors. Aera lists the PI-980 range as multi-gas, multi-range and field programmable, with all-metal seals.

What is on the connector end?

A 9-pin D-sub, a MODE button and a STATUS LED. Firmware is 3.21 per the CAL DATA label. The round seal sticker on the side is intact in the photos.

Ships from
Israel
Tracking
Included on every order

Import duties and taxes may apply in your country and are paid by the buyer on delivery.

Returns
Not accepted

Return terms differ from item to item — this item's own policy is shown above.

Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.

Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.

Read the full returns & warranty policy

Questions about this part

What gas is the 797-160431-073 set for?

Si(CH3)4, tetramethylsilane, at 500 SCCM full scale. SEMI gas code 251, conversion factor 0.174.

Why does the cal label say 3000 SCCM N2?

That is the N2 calibration range of the FCPIR981CBAX9THA. The Lam label gives the 500 SCCM Si(CH3)4 setup it runs on the tool.

Is this the same as Lam 797-160431-072?

Same Aera model, different Lam dash number. The -072 is set for H2 at 3000 SCCM; this -073 is set for Si(CH3)4 at 500 SCCM.

How does a pressure insensitive MFC work?

It keeps the set flow when the inlet pressure changes, so pressure swings on the gas line are not passed on as flow changes.

Is it an Aera or a Hitachi Metals MFC?

Both names are on it: Aera on the cover, Hitachi Metals, Ltd. on the side label.

Which firmware does it have?

3.21, per the CAL DATA label.

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