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About this part

The Aera FC-PIR98x MGMR Mass Flow Controller FCPIR981CBAX9THA, Lam Research 797-160431-072, 3000 SCCM H2 is made by AERA and identified by manufacturer part number 797-160431-072.

This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.

Condition

This item is listed as Used. Previously used. See condition notes and photos.

The photos are part of the description — check them for labels, connectors, markings and any visible wear.

What's included

1 × Aera FC-PIR98x MGMR Mass Flow Controller FCPIR981CBAX9THA, Lam Research 797-160431-072, 3000 SCCM H2.

Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.

Identification & compatibility

Check the manufacturer (AERA), the part number (797-160431-072) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.

Price match

Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.

Important information

Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.

Brand
AERA
Part number
797-160431-072
Brand / maker
Aera; label: Hitachi Metals, Ltd.
Series
FC-PIR98x pressure insensitive MFC, MGMR
Model
FCPIR981CBAX9THA
Lam Research P/N
797-160431-072
Configured gas
H2 (SEMI gas 7), CF 1.017
Full scale (UFS)
3000 SCCM
Calibration gas / range
N2, 3000 SCCM
Bin
MULTI-07
Firmware
3.21
Connector
9-pin D-sub, MODE button, STATUS LED
Serial number
C160727182
Manufactured
2016-09-30, made in China (label)

Lam Research 797-160431-072, an Aera FC-PIR98x pressure insensitive MFC set up for H2 at 3000 SCCM. Model FCPIR981CBAX9THA, the MGMR (multi-gas, multi-range) version. The side label names Hitachi Metals, Ltd. as maker. Serial C160727182, manufactured 2016-09-30. Also written 797160431072 or FCPIR981 CBAX9THA.

What gas is this Aera MFC configured for?

The Lam label at the connector end reads UFS 3000 SCCM, GAS H2(1.017), SEMI GAS 7, CF 1.017, BIN MULTI-07. Calibration was done on N2: the CAL DATA label (headed LAM DEP) gives a 3000 SCCM range and N2 check points at 100, 50, 30 and 10% of full scale.

How does a pressure insensitive MFC differ from a standard one?

A pressure insensitive (PI) mass flow controller keeps the set flow steady when the supply pressure upstream changes, so swings on the gas line do not show up as flow errors. Aera lists the PI-980 range as multi-gas, multi-range and field programmable, with all-metal seals.

What is on the connector end?

A 9-pin D-sub, a MODE button and a STATUS LED. The CAL DATA label gives firmware 3.21. The manufacturer's seal sticker on the side is still in place in the photos. The cover is printed RoHS compliant.

Ships from
Israel
Tracking
Included on every order

Import duties and taxes may apply in your country and are paid by the buyer on delivery.

Returns
Not accepted

Return terms differ from item to item — this item's own policy is shown above.

Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.

Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.

Read the full returns & warranty policy

Questions about this part

Which Lam part number does this MFC carry?

797-160431-072, printed on the label at the connector end.

What gas and flow is it set for?

H2 at 3000 SCCM full scale, SEMI gas code 7, conversion factor 1.017.

Is it an Aera or a Hitachi Metals MFC?

Both names are on it. Aera is the brand on the cover, and the side label names Hitachi Metals, Ltd.

How does a pressure insensitive MFC work?

It holds the set flow when the inlet pressure changes, so pressure swings on the gas line are not passed on as flow changes.

Can the FC-PIR98x be set for other gases?

Aera lists multi-gas, multi-range configuration for this range. As shipped, this unit is set for H2.

Which firmware is on the unit?

Firmware 3.21, per the calibration label.

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