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Product details

About this part

The Aera FC-PIR98x MGMR Mass Flow Controller FCPIR981C4VX9THA, Lam Research 797-160426-007, 10000 SCCM N2 is made by AERA and identified by manufacturer part number 797-160426-007.

This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.

Condition

This item is listed as Used. Previously used. See condition notes and photos.

The photos are part of the description — check them for labels, connectors, markings and any visible wear.

What's included

1 × Aera FC-PIR98x MGMR Mass Flow Controller FCPIR981C4VX9THA, Lam Research 797-160426-007, 10000 SCCM N2.

Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.

Identification & compatibility

Check the manufacturer (AERA), the part number (797-160426-007) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.

Price match

Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.

Important information

Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.

Brand
AERA
Part number
797-160426-007
Brand / maker
Aera; label: Hitachi Metals, Ltd.
Series
FC-PIR98x pressure insensitive MFC, MGMR
Model
FCPIR981C4VX9THA
Lam Research P/N
797-160426-007
Configured gas
N2 (SEMI gas 13), CF 1.000
Full scale (UFS)
10000 SCCM
Calibration
N2, 10000 SCCM; 100/50/30/10% points on CAL DATA label
Bin
MULTI-08
Firmware
3.21
Connector
9-pin D-sub, MODE button, STATUS LED, display window
Serial number
C170502105
Manufactured
2017-05-24, made in China (label)

Lam Research 797-160426-007, an Aera FC-PIR98x pressure insensitive MFC set up for N2 at 10000 SCCM. Model FCPIR981C4VX9THA, the MGMR (multi-gas, multi-range) version. The side label names Hitachi Metals, Ltd. as maker, serial C170502105, manufactured 2017-05-24. Also written 797160426007 or FCPIR981 C4VX9THA.

What gas and range is this Aera MFC set to?

The Lam label at the connector end reads UFS 10000 SCCM, GAS N2, SEMI GAS 13, CF 1.000, BIN MULTI-08. The CAL DATA label (headed LAM DEP) shows the N2 check points: 10000.2 SCCM at 100%, 5001.483 at 50%, 2999.966 at 30% and 1000.234 at 10%.

Why pick a pressure insensitive MFC?

A pressure insensitive (PI) mass flow controller holds the set flow when the upstream supply pressure moves, so swings on a shared gas line do not show up as flow errors. Aera lists the PI-980 range as multi-gas, multi-range and field programmable, with all-metal seals.

What is on the connector end?

A 9-pin D-sub, a small display window, a MODE button and a STATUS LED. Firmware is 3.21 per the CAL DATA label. The round WARRANTY VOID IF SEAL IS BROKEN sticker on the side is intact in the photos.

Ships from
Israel
Tracking
Included on every order

Import duties and taxes may apply in your country and are paid by the buyer on delivery.

Returns
Not accepted

Return terms differ from item to item — this item's own policy is shown above.

Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.

Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.

Read the full returns & warranty policy

Questions about this part

Can the FCPIR981C4VX9THA run gases other than N2?

The FC-PIR98x is a multi-gas, multi-range design, so it can be reconfigured with Aera's software. As shipped, the labels say N2, 10000 SCCM.

What does SEMI GAS 13 mean on the label?

It is the SEMI gas code for nitrogen, matching GAS: N2 and a conversion factor of 1.000.

Is the Aera MFC made by Hitachi Metals?

Yes. The side label reads Hitachi Metals, Ltd., made in China, on an Aera-branded cover.

What is the difference between 797-160426-007 and 797-160426-003?

Both are Aera FCPIR981C4VX9THA; the Lam suffix marks the setup. This -007 unit is N2 at 10000 SCCM, while a -003 unit we have seen is labeled SiH4 at 1500 SCCM.

Which connector does it use?

A 9-pin D-sub on the top end, next to the MODE button and STATUS LED.

Guides for this part

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