Photos show the actual item you will receive.
Product details
About this part
The Applied Materials 0040-48767 Rev 002 Cathode Base, E-Chuck, 300mm, Ultima X is made by Applied Materials and identified by manufacturer part number 0040-48767.
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × Applied Materials 0040-48767 Rev 002 Cathode Base, E-Chuck, 300mm, Ultima X.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (Applied Materials), the part number (0040-48767) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.
Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- Applied Materials
- Part number
- 0040-48767
- Model
- 0040-48767
- Manufacturer
- Applied Materials
- Description (other listings)
- CATHODE BASE, E-CHUCK, 300MM ULTIMA X, H
- Wafer size
- 300 mm
- Engraved serial
- 10670800-292-0082
- Hand-etched marking
- 0010-10462-003, 332-004, 10670800
- Material
- Machined aluminum (as shown)
- Packaging
- Bagged, in a blue foam-lined box
- Included
- Cathode base only, no ceramic chuck
Applied Materials 0040-48767 Rev 002, the machined aluminum cathode base for a 300 mm electrostatic chuck (e-chuck). The inner face is engraved 0040-48767 REV 002 and 10670800-292-0082. Also written 0040-48767-002 or 004048767.
Is the electrostatic chuck itself included?
No. This is a semiconductor chamber part, not a complete chuck. The photos show the aluminum base only, a round bowl with a channel pattern machined into the floor and threaded inserts around the rim. There is no ceramic chuck surface on it.
Which Applied Materials tool is it for?
Other listings of 0040-48767 carry the Applied Materials description CATHODE BASE, E-CHUCK, 300MM ULTIMA X, H, which points to the Ultima X chamber. Nothing on the part names the tool, so check your chamber's parts list.
What is etched on the bottom?
A hand-etched note on the underside reads 0010-10462-003, 332-004 and 10670800. The 10670800 matches the start of the engraved serial. The meaning of 0010-10462-003 is not stated on the part; it may be the assembly the base came out of.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Accepted within 60 days of delivery
- Return shipping
- Free — paid by us
- Refund
- Money back
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
Is 0040-48767 Rev 002 the same as Rev 003?
Same part number, different revision. This unit is engraved REV 002; order the revision your chamber calls for.
Does the base come with the e-chuck puck?
No. It is the aluminum base only.
Is the Applied Materials 0040-48767 for the Ultima X?
Other sellers list it with the Applied Materials description ending 300MM ULTIMA X, H. The part itself does not name the tool.
Are there marks on the surface?
Yes. The inner floor has dark spots and residue marks, visible in the photos.
How is it packed?
In a plastic bag inside a blue box with cut foam, as shown in the first photo.
Over 1,000 positive reviews from our customers
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