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Product details
About this part
The Pearl Kogyo CF-500-400K(CE) RF Power Supply Hitachi M-712E is made by Pearl Kogyo and identified by manufacturer part number CF-500-400K(CE).
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × Pearl Kogyo CF-500-400K(CE) RF Power Supply Hitachi M-712E.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (Pearl Kogyo), the part number (CF-500-400K(CE)) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.
Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- Pearl Kogyo
- Part number
- CF-500-400K(CE)
- Model
- CF-500-400K(CE)
- Country of Origin
- Japan
- Manufacturer
- Pearl Kogyo Co., Ltd., Osaka, Japan
- Output frequency
- 400 kHz
- High frequency output
- 500 W
- Input power
- 200 VAC, 3-phase, 3.5 kVA
- Operating modes (panel)
- CW / PULSE
- Front-panel meters
- Forward power, reflected power, duty/frequency, VDC/VPP
- Rear connectors
- TB1, TB2, TB3, I/O, A-I/O; SRF-OUT coaxial RF output, S-OUT
- Mass (nameplate)
- 34 kg
- Date (nameplate)
- 2006-04-27
- Panel tag
- EC1 RF P/S
- Condition
- Used
This is a Pearl Kogyo CF-500-400K(CE) RF power supply: a 400 kHz, 500 W high-frequency generator with 200 VAC 3-phase input, made in Japan in 2006. Pearl Kogyo of Osaka makes high-frequency generators and matching boxes for semiconductor manufacturing equipment, where an RF power supply drives the plasma in etch and deposition chambers. A front-panel tag reads EC1 RF P/S.
What does the nameplate say?
Model CF-500-400K(CE). Input power 200 VAC 3Φ 3.5 kVA. Frequency 400 kHz. High frequency output 500 W. Mass 34 kg. Date 2006.4.27. S/No NA060018. Pearl Kogyo Co., Ltd., Osaka, Japan.
What is on the front panel?
Four displays: forward power, reflected power, duty/frequency and VDC/VPP. Dials for RF, duty and frequency control, a mode selector, a CW / PULSE switch, OSC and STBY/RESET buttons, status lamps (interlock, PRR, PRD, temp, option, panel, control) and a MAIN breaker. Rack handles on both sides.
What connections are on the back?
TB1 power input (marked 200VAC/3.5KVA), TB2 and TB3 circular connectors, I/O and A-I/O D-sub connectors, four cooling fans and a CE mark. A side box carries the SRF-OUT coaxial RF output and an S-OUT D-sub connector.
What condition is it in?
Used. The case shows scratches and wear from service, as seen in the photos.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Not accepted
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
What is the Pearl Kogyo CF-500-400K?
An RF power supply (high-frequency generator) rated 500 W at 400 kHz, with 200 VAC 3-phase input.
What is an RF power supply for plasma used for?
It delivers radio-frequency power to a plasma chamber, usually through a matching box, to create and hold the plasma used for etching or deposition.
How does an RF generator for plasma work?
It converts mains power into RF power at a set frequency, here 400 kHz. The forward and reflected power meters show how much power reaches the load and how much comes back.
Can it run in pulse mode?
The front panel has a CW / PULSE switch plus duty and frequency controls, so it offers both continuous and pulsed operation.
What input power does it need?
200 VAC 3-phase, 3.5 kVA, per the nameplate.
What does (CE) mean in the model?
It is part of the model name on the nameplate, and the rear panel carries a CE mark.
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