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Product details
About this part
The Horiba STEC SEC-Z719MGX Digital Mass Flow Module - Used by Lam Research is made by Horiba STEC and identified by manufacturer part number 788-810063-200.
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × Horiba STEC SEC-Z719MGX Digital Mass Flow Module - Used by Lam Research.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (Horiba STEC), the part number (788-810063-200) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
Found an identical item for less at a fixed price elsewhere? Contact us before you buy with the details, and we will review it.
Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- Horiba STEC
- Part number
- 788-810063-200
- Model
- SEC-Z719MGX
- Country of Origin
- Japan
- Lam Research tag
- CF4, 200 SCCM, P/N 788-810063-200
- Series
- HORIBA STEC SEC-Z700 digital mass flow module (Z700)
- Nameplate gas / flow rate
- N2, 1000 SCCM
- Calibration (nameplate)
- N2, C.F. 1.000
- Multi-range / multi-gas no.
- MR. MG-04
- Valve
- C (normally closed)
- Fitting code
- 14C3; surface-mount base
- Protocol (nameplate)
- Z30, 485 (RS-485)
- Connectors
- 9-pin D-sub and 2 × RJ-45, top of case
- Top panel
- Display, DISPLAY MODE and ZERO keys, MSD/LSD address switches, data-rate switch (115.2k / 38.4k / 9.6k / PGM), %FLOW, %SET, kPa and psia LEDs
- Option codes (nameplate)
- 7014, 7042
- Inspected (nameplate)
- 05 Aug 2022
- Markings
- CE, UKCA, KC, Made in Japan
The HORIBA STEC SEC-Z719MGX with Lam Research part number 788-810063-200 is a Z700-series digital mass flow module. It carries a Lam tag reading CF4, 200 SCCM. The Z700 is a HORIBA STEC thermal mass flow module with pressure-insensitive control and multi-gas / multi-range capability. It has a display on top that can show flow, temperature and pressure. This unit's HORIBA nameplate is dated 05 Aug 2022 and carries CE, UKCA and KC marks. Buyers also search it as SEC-Z719 MGX or 788-810063-200.
Why do the Lam tag and the HORIBA nameplate show different gases?
They record different things. The HORIBA nameplate gives gas N2, flow rate 1000 SCCM, calibration N2 with C.F. 1.000, and the multi-range / multi-gas number MR. MG-04. The Lam tag on the top panel reads CF4, 200 SCCM and 788-810063-200. HORIBA describes the SEC-Z700 series as multi-gas and multi-range: its configuration software can change the gas type and full-scale flow rate. Confirm the gas and range your tool expects before installation.
What interface does it have?
The nameplate lists protocol Z30, 485 (RS-485), with option codes 7014 and 7042, and valve type C (normally closed). On top of the case are a 9-pin D-sub connector, two RJ-45 jacks, and MSD/LSD address switches. A data-rate selector offers 115.2k, 38.4k, 9.6k and PGM, alongside ZERO and DISPLAY MODE keys. Gas enters and leaves through a surface-mount base, fitting code 14C3 on the nameplate.
What condition is it in?
Used. The photos show intact labels and the HORIBA tamper-seal sticker still in place. They also show marks and a stain on the metal base.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Not accepted
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
What gas is the SEC-Z719MGX 788-810063-200 set for?
The Lam Research tag reads CF4, 200 SCCM. The HORIBA nameplate shows the calibration base, N2 at 1000 SCCM with C.F. 1.000. Because the SEC-Z700 is a multi-gas / multi-range module, confirm the gas and range your tool expects.
What communication does it use?
The nameplate lists protocol Z30, 485 (RS-485). The case has a 9-pin D-sub connector and two RJ-45 jacks, with rotary address switches and a data-rate selector.
What is the difference between 788-810063-200 and 788-810019-200?
Both are SEC-Z719MGX modules with the same N2 1000 SCCM nameplate, but the Lam tags differ. 788-810063-200 reads CF4, 200 SCCM, and 788-810019-200 reads Cl2, 200 SCCM.
Is the valve normally open or normally closed?
Normally closed. The nameplate valve code is C, which HORIBA's model-code legend defines as normally closed.
Is the factory seal intact?
The photos show the HORIBA tamper-seal sticker in place on the case.
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