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Product details
About this part
The VERITY SD1024F SPECTROMETER 3D80-000906-V4 SENSOR, EPD sEPD H is made by VERITY and identified by manufacturer part number 3D80-000906-V4.
This listing is for the exact part number stated above. Compare the part number, condition and photos with your equipment before ordering.
Condition
This item is listed as Used. Previously used. See condition notes and photos.
The photos are part of the description — check them for labels, connectors, markings and any visible wear.
What's included
1 × VERITY SD1024F SPECTROMETER 3D80-000906-V4 SENSOR, EPD sEPD H.
Only the items listed here or clearly shown in the photos are included. Cables, manuals, mounting hardware and accessories are not included unless stated.
Identification & compatibility
Check the manufacturer (VERITY), the part number (3D80-000906-V4) and the photos against your equipment. If you are not sure this is the right part, contact us before you order.
Price match
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Important information
Product information is based on what is available for this specific item. Where specifications or compatibility are critical to your application, confirm them before purchase.
- Brand
- VERITY
- Part number
- 3D80-000906-V4
- Model
- SD1024F
- Country of Origin
- United States
- Manufacturer
- Verity Instruments, Inc.
- Verity part no. (label)
- 1007563
- Other label
- 3D80-000906-V4, SENSOR, EPD sEPD H
- Wavelength range
- 200-800 nm
- Detector
- 1024-element scientific-grade CCD array
- Fiber input
- Single or multi-fiber
- Interfaces
- J1-COM1, J2-COM2, J3-I/O, J4-PWR, J6-CNTL; Ethernet, RS-232, digital I/O per Verity
- Power (label)
- 24 V DC, 2 A max, 2.5 A fuse
- Software
- Verity SpectraView
- Factory IP (label)
- 192.168.100.189
- Compliance (labels)
- CE, RoHS 2002/95/EC
- Status
- Discontinued by Verity, replaced by SD1024G series
The Verity Instruments SD1024F is an optical emission spectrometer for semiconductor process endpoint detection, covering 200 to 800 nm with a 1024-element scientific-grade CCD array. This unit carries Verity part number 1007563 and a second label reading 3D80-000906-V4 "SENSOR, EPD sEPD H" (EPD = endpoint detection). Verity lists the SD1024F as discontinued and replaced by the SD1024G series.
What is an endpoint detection spectrometer used for?
It watches the light given off by the plasma in a process chamber. When the film being etched is cleared, the emission spectrum changes, and the spectrometer reports the endpoint so the tool can stop the step. Verity names etch, photoresist strip, CVD etchback and CMP among the processes its instruments serve, along with fault detection and process diagnostics.
What does Verity say about the SD1024F?
It was designed for demanding semiconductor process applications, with strong UV response down to 200 nm, stability under UV exposure, high sensitivity, wide dynamic range and good output linearity. It takes single or multi-fiber input, is RoHS compliant, and works with Verity SpectraView software, with tool integration over Ethernet, RS-232 and digital I/O.
What do the labels and panels show?
Verity label: MODEL SD1024F, PART NO. 1007563, SERIAL NO. 1126086, 24 V DC, 2 A max, CE, made in USA with components of US and foreign origin, factory IP 192.168.100.189. The connector panel has J1-COM1, J2-COM2, J3-I/O, J4-PWR and J6-CNTL, a 2.5 A fuse, a power switch and an LCD display. A caution label says not to switch it back on until 10 seconds after switching off. The rear has the optical input window, a ground stud and a RoHS 2002/95/EC sticker.
What condition is it in?
Used. Dust caps are fitted on J1, J3 and J6, and an "INSPECTED SE2000" sticker is on the case.
- Ships from
- Israel
- Tracking
- Included on every order
Import duties and taxes may apply in your country and are paid by the buyer on delivery.
- Returns
- Not accepted
Return terms differ from item to item — this item's own policy is shown above.
Whatever it says, an item that arrives faulty or not as described is covered: tell us within 30 days of delivery and we will refund or replace it.
Consumers in the EU, the UK and Israel keep their legal right to cancel within 14 days. Full details and the return request form are on our Returns and warranty page.
Questions about this part
What is the Verity SD1024F?
An optical emission spectrometer made by Verity Instruments for semiconductor endpoint detection, fault detection and process diagnostics, covering 200-800 nm with a 1024-element CCD.
How does optical emission spectroscopy endpoint detection work?
The spectrometer reads the light emitted by the process plasma. When the layer being etched is cleared, the intensity at certain wavelengths changes, and the software flags that change as the endpoint.
What is 3D80-000906-V4?
A part number on a label on the back of this unit, with the description SENSOR, EPD sEPD H. Verity's own part number on the rating label is 1007563.
Is the SD1024F still made?
No. Verity lists it as discontinued and replaced by the SD1024G series.
What power does it need?
24 V DC, 2 A max, as printed on the rating label and connector panel. It has a 2.5 A fuse.
What software does it work with?
Verity SpectraView. Tool integration is through Ethernet, RS-232 and digital I/O.
What condition is it in?
Used, with dust caps on three of the connectors.
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